EELS analyses of metal-inserted high-k dielectric stacks

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Authors
MacKenzie, M.; Craven, A.J.; McComb, D.W.; McGilvery, C.M.; McFadzean, S.; De Gendt, Stefan
Conference
EMC. 14th European Microscopy Congress. Volume 2: Materials Science
Title
EELS analyses of metal-inserted high-k dielectric stacks
Publication type
Proceedings paper
Embargo date
9999-12-31
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