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EELS analyses of metal-inserted high-k dielectric stacks

dc.contributor.authorMacKenzie, M.
dc.contributor.authorCraven, A.J.
dc.contributor.authorMcComb, D.W.
dc.contributor.authorMcGilvery, C.M.
dc.contributor.authorMcFadzean, S.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-17T08:37:16Z
dc.date.available2021-10-17T08:37:16Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14083
dc.sourceIIOimport
dc.titleEELS analyses of metal-inserted high-k dielectric stacks
dc.typeProceedings paper
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage23
dc.source.endpage24
dc.source.conferenceEMC. 14th European Microscopy Congress. Volume 2: Materials Science
dc.source.conferencedate1/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - open access


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