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Sr-Cp precursor based ALD SrTiO3 for capacitor applications

dc.contributor.authorMaes, Jan
dc.contributor.authorBlomberg, T.
dc.contributor.authorMatero, R.
dc.contributor.authorTuominen, M.
dc.contributor.authorSwerts, Johan
dc.contributor.authorMenou, Nicolas
dc.contributor.authorWang, Xin Peng
dc.contributor.authorKittl, Jorge
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-17T08:40:11Z
dc.date.available2021-10-17T08:40:11Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14093
dc.sourceIIOimport
dc.titleSr-Cp precursor based ALD SrTiO3 for capacitor applications
dc.typeProceedings paper
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorSwerts, Johan
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference8th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate29/06/2008
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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