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Parylene N as a dielectric material for through silicon vias
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Authors
Majeed, Bivragh
;
Pham, Nga
;
Sabuncuoglu Tezcan, Deniz
;
Beyne, Eric
Conference
58th Electronic Components and Technology Conference - ECTC
Title
Parylene N as a dielectric material for through silicon vias
Publication type
Proceedings paper
Embargo date
9999-12-31
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