dc.contributor.author | Majeed, Bivragh | |
dc.contributor.author | Pham, Nga | |
dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-17T08:42:46Z | |
dc.date.available | 2021-10-17T08:42:46Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14102 | |
dc.source | IIOimport | |
dc.title | Parylene N as a dielectric material for through silicon vias | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Majeed, Bivragh | |
dc.contributor.imecauthor | Pham, Nga | |
dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1556 | |
dc.source.endpage | 1561 | |
dc.source.conference | 58th Electronic Components and Technology Conference - ECTC | |
dc.source.conferencedate | 27/05/2008 | |
dc.source.conferencelocation | Lake Buena Vista, FL USA | |
imec.availability | Published - open access | |