Authors

Mannaert, Geert; Baklanov, Mikhaïl; Goossens, Danny; Vrancken, Christa; Boullart, Werner

Conference

Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS

Title

Development of a metal gate and silicon selective "dry ash only" process for combined extension and halo implanted photo resist

Publication type

Proceedings paper

Embargo date

9999-12-31