Publication:
Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry
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1872 since deposited on 2021-10-17
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Acq. date: 2026-08-07
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Statistics
Views
1872 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-07
Citations