Show simple item record

Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

dc.contributor.authorMarsik, Premysl
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVinokur, Klara
dc.contributor.authorCohen, Yoel
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T08:49:48Z
dc.date.available2021-10-17T08:49:48Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14126
dc.sourceIIOimport
dc.titleChanges of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage1079-N07-04
dc.source.conferenceMaterials and Processes for Advanced Interconnects for Microelectronics
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1079E


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record