0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications

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Authors
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge
Conference
Technical Digest International Electron Devices Meeting - IEDM
Title
0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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