Show simple item record

Acoustic cleaning in nano-electronics

dc.contributor.authorMertens, Paul
dc.contributor.authorJanssens, Tom
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorHalder, Sandip
dc.contributor.authorWostyn, Kurt
dc.contributor.authorAndreas, Michael
dc.contributor.authorHoyer, Ronald
dc.contributor.authorBarbagini, Francesca
dc.contributor.authorWada, Masayuki
dc.contributor.authorFranklin, Cole
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorKim, K
dc.contributor.authorKenis, Karine
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorClaes, Martine
dc.contributor.authorKesters, Els
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorBearda, Twan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-17T08:59:53Z
dc.date.available2021-10-17T08:59:53Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14158
dc.sourceIIOimport
dc.titleAcoustic cleaning in nano-electronics
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage556
dc.source.endpage560
dc.source.conferenceAcoustics
dc.source.conferencedate29/06/2008
dc.source.conferencelocationParis France
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
17842.pdf
Size:
799.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record