Ni(Pt)Si thermal stability improvement by carbon implantation

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Authors
Mertens, Sofie; Hoffmann, Thomas Y.; Vrancken, Christa; Jakschik, S.; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Absil, Philippe; Lauwers, Anne
Conference
213th ECS Meeting
Title
Ni(Pt)Si thermal stability improvement by carbon implantation
Publication type
Meeting abstract
Embargo date
9999-12-31
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