dc.contributor.author | Molle, Alessandro | |
dc.contributor.author | Spiga, Sabina | |
dc.contributor.author | Fanciulli, Marco | |
dc.contributor.author | Brammertz, Guy | |
dc.contributor.author | Meuris, Marc | |
dc.date.accessioned | 2021-10-17T09:08:05Z | |
dc.date.available | 2021-10-17T09:08:05Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14184 | |
dc.source | IIOimport | |
dc.title | In situ interface and surface characterization of Ge passivated III-V substrates for high-k oxide deposition | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Brammertz, Guy | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.source.peerreview | no | |
dc.source.conference | E-MRS Spring Meeting Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS | |
dc.source.conferencedate | 26/05/2008 | |
dc.source.conferencelocation | Strasbourg France | |
imec.availability | Published - imec | |