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Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry

dc.contributor.authorNagar, Magi
dc.contributor.authorVaes, Jan
dc.contributor.authorEin Eli, Yair
dc.date.accessioned2021-10-17T09:16:17Z
dc.date.available2021-10-17T09:16:17Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14211
dc.sourceIIOimport
dc.titleElucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference8th Israel Conference on Corrosion
dc.source.conferencedate21/05/2008
dc.source.conferencelocationHaifa Israel
imec.availabilityPublished - imec


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