Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry
dc.contributor.author | Nagar, Magi | |
dc.contributor.author | Vaes, Jan | |
dc.contributor.author | Ein Eli, Yair | |
dc.date.accessioned | 2021-10-17T09:16:17Z | |
dc.date.available | 2021-10-17T09:16:17Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14211 | |
dc.source | IIOimport | |
dc.title | Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry | |
dc.type | Oral presentation | |
dc.source.peerreview | no | |
dc.source.conference | 8th Israel Conference on Corrosion | |
dc.source.conferencedate | 21/05/2008 | |
dc.source.conferencelocation | Haifa Israel | |
imec.availability | Published - imec |
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