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Low-temperature chemical vapor deposition of highly doped n-type epitaxial Si at high growth rate
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Authors
Nguyen, Duy
;
Loo, Roger
;
Caymax, Matty
ISSN
0169-4332
Issue
19
Journal
Applied Surface Science
Volume
254
Title
Low-temperature chemical vapor deposition of highly doped n-type epitaxial Si at high growth rate
Publication type
Journal article
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