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Study of the surface reactions of ALD hafnium aluminates

dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVinckier, Chris
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-17T09:23:06Z
dc.date.available2021-10-17T09:23:06Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14232
dc.sourceIIOimport
dc.titleStudy of the surface reactions of ALD hafnium aluminates
dc.typeMeeting abstract
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceALD Conference
dc.source.conferencedate29/06/2008
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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