Effects of electron and proton radiation on embedded SiGe source/drain diodes

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Authors

Ohyama, H.; Nagano, T.; Takakura, K.; Motoki, M.; Matsuo, M.; Nakamura, H.; Sawada, M.; Midorikawa, M.; Kuboyama, S.; Bargallo Gonzalez, Mireia; Simoen, Eddy; Claeys, Cor

ISSN

1369-8001

Issue

5_6

Journal

Materials Science in Semiconductor Processing

Volume

11

Title

Effects of electron and proton radiation on embedded SiGe source/drain diodes

Publication type

Journal article

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