Publication:
Hybrid fixed abrasive CMP for 65 nm STI integration, FinFet structures and other advanced applications
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1845 since deposited on 2021-10-17
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Acq. date: 2026-08-10
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Statistics
Views
1845 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-10
Citations