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Laser-annealed junctions with advanced CMOS gate stacks for 32nm node: perspectives on device performance and manufacturability
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1973 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-07
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Metrics
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1973 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-07
Citations