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Laser-annealed junctions with advanced CMOS gate stacks for 32nm node: perspectives on device performance and manufacturability
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1975 since deposited on 2021-10-17
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Acq. date: 2026-02-28
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1975 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-02-28
Citations