Publication:

Trapping in 1nm EOT high-k dielectrics

Date

2008
Meeting abstract
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17124.pdf 170.74 KB

Author(s)

Pantisano, Luigi
;
Zahid, Mohammed
;
Degraeve, Robin  
;
Groeseneken, Guido  

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Abstract

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1871 since deposited on 2021-10-17
Acq. date: 2026-02-26

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