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Trapping in 1nm EOT high-k dielectrics

dc.contributor.authorPantisano, Luigi
dc.contributor.authorZahid, Mohammed
dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-17T09:34:55Z
dc.date.available2021-10-17T09:34:55Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14266
dc.sourceIIOimport
dc.titleTrapping in 1nm EOT high-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1928
dc.source.conference214th ECS Meeting
dc.source.conferencedate10/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; VOl. MA 2008-02


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