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Air-gap formation by UV-assisted decomposition of CVD material

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorHumbert, Aurelie
dc.contributor.authorVan Besien, Els
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorTravaly, Youssef
dc.contributor.authorRichard, Olivier
dc.contributor.authorWillegems, Myriam
dc.contributor.authorVolders, Henny
dc.contributor.authorKellens, Kristof
dc.contributor.authorDaamen, Roel
dc.contributor.authorHoofman, Romano
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T09:35:44Z
dc.date.available2021-10-17T09:35:44Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14268
dc.sourceIIOimport
dc.titleAir-gap formation by UV-assisted decomposition of CVD material
dc.typeMeeting abstract
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHumbert, Aurelie
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecHumbert, Aurelie::0000-0002-2538-8991
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.source.peerreviewyes
dc.source.conference17th Workshop Materials for Advanced Metallization
dc.source.conferencedate2/03/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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