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Performance and leakage optimization in carbon and fluorine C0-implanted pMOSFETs
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Authors
Pawlak, Bartek
;
Duffy, Ray
;
Hooker, Jacob
;
Hoffmann, Thomas
;
Felch, S.B.
;
Eyben, Pierre
;
Absil, Philippe
;
Lander, Rob
Conference
International Symposium on VLSI Technology, Systems and Applications - VLSI-TSA
Title
Performance and leakage optimization in carbon and fluorine C0-implanted pMOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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