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Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation

dc.contributor.authorPfeffer, Markus
dc.contributor.authorOechsner, Richard
dc.contributor.authorPfitzner, Lothar
dc.contributor.authorRyssel, Heiner
dc.contributor.authorOcker, Berthold
dc.contributor.authorVerdonck, Patrick
dc.date.accessioned2021-10-17T09:49:46Z
dc.date.available2021-10-17T09:49:46Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14311
dc.sourceIIOimport
dc.titlePerformance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
dc.typeProceedings paper
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.conferenceASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - IDETC/CIE
dc.source.conferencedate3/08/2008
dc.source.conferencelocationBrooklyn, NY USA
imec.availabilityPublished - imec


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