dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Mesuda, Kei | |
dc.date.accessioned | 2021-10-17T09:50:47Z | |
dc.date.available | 2021-10-17T09:50:47Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14314 | |
dc.source | IIOimport | |
dc.title | Mask transmission resonance in bi-layer masks | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.source.peerreview | no | |
dc.source.beginpage | 702815 | |
dc.source.conference | Photomask and Next-Generation Lithography Mask Technology XV | |
dc.source.conferencedate | 16/04/2008 | |
dc.source.conferencelocation | Yokohama Japan | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings of SPIE; Vol. 7028 | |