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High resolution study of high-k dielectrics with Conductive AFM
Publication:
High resolution study of high-k dielectrics with Conductive AFM
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Date
2008
Proceedings Paper
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17562.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Polspoel, Wouter
;
Vandervorst, Wilfried
Journal
Abstract
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1877
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Acq. date: 2025-12-11
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Views
1877
since deposited on 2021-10-17
3
last month
Acq. date: 2025-12-11
Citations