Publication:
Ultra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technology
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1931 since deposited on 2021-10-17
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Acq. date: 2026-05-18
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Statistics
Views
1931 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-05-18
Citations