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Ultra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technology

dc.contributor.authorPosada Quijano, Guillermo
dc.contributor.authorCarchon, Geert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.date.accessioned2021-10-17T09:57:57Z
dc.date.available2021-10-17T09:57:57Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14336
dc.sourceIIOimport
dc.titleUltra-miniaturized integrated cavities on high-resistivity silicon thin-film MCM-D technology
dc.typeProceedings paper
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewyes
dc.source.beginpage139
dc.source.endpage142
dc.source.conferenceTopical Meeting on Silicon Monolitic Integrated Circuits in RF Systems - SiRF
dc.source.conferencedate23/01/2008
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - imec


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