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Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology
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Authors
Put, Sofie
;
Simoen, Eddy
;
Van Huylenbroeck, Stefaan
;
Claeys, Cor
;
Van Uffelen, Nick
;
Leroux, P.
Conference
8th European Workshop on Radiation Effects on Components and Systems - RADECS
Title
Effect of airgap deep trench isolation on the gamma radiation behavior of a 0.13 μm SiGe:C NPN HBT technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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