Lithography options for the 32nm half pitch node and beyond

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Authors
Ronse, Kurt; Jansen, Philippe; Gronheid, Roel; Hendrickx, Eric; Maenhoudt, Mireille; Goethals, Mieke; Vandenberghe, Geert
Conference
IEEE Custom Integrated Circuits Conference - CICC
Title
Lithography options for the 32nm half pitch node and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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