Authors

Rottenberg, Xavier; Czarnecki, Piotr; Tilmans, Harrie; De Raedt, Walter; De Wolf, Ingrid

Conference

EuroSimE: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems

Title

Multi-physics simulation and reliability analysis for RF-MEMS devices

Publication type

Proceedings paper

Embargo date

9999-12-31