Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Multi-physics simulation and reliability analysis for RF-MEMS devices
Publication:
Multi-physics simulation and reliability analysis for RF-MEMS devices
Copy permalink
Date
2008
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16225.pdf
582.58 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rottenberg, Xavier
;
Czarnecki, Piotr
;
Tilmans, Harrie
;
De Raedt, Walter
;
De Wolf, Ingrid
Journal
Abstract
Description
Statistics
Views
1906
since deposited on 2021-10-17
Acq. date: 2026-08-07
Citations
Statistics
Views
1906
since deposited on 2021-10-17
Acq. date: 2026-08-07
Citations