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Multi-physics simulation and reliability analysis for RF-MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T10:18:06Z
dc.date.available2021-10-17T10:18:06Z
dc.date.issued2008-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14395
dc.sourceIIOimport
dc.titleMulti-physics simulation and reliability analysis for RF-MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceEuroSimE: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
dc.source.conferencedate20/04/2008
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - open access
imec.internalnoteskeynote presentation


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