Laser annealing of double implanted layers for IGBT power devices

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Authors
Sabatier, Clement; Rack, Simon; Beseaucèle, Herve; Venturini, Julien; Hoffmann, Thomas Y.; Rosseel, Erik; Steenbergen, Johnny
Conference
16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
Title
Laser annealing of double implanted layers for IGBT power devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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