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ESD issues in MEMS: a case study in micromirrors
Publication:
ESD issues in MEMS: a case study in micromirrors
Date
2008
Presentation
Simple item page
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15956.pdf
310.78 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Linten, Dimitri
;
Scholz, Mirko
;
Thijs, Steven
;
Haspeslagh, Luc
;
Witvrouw, Ann
;
Van Hoof, Chris
;
Groeseneken, Guido
;
De Wolf, Ingrid
Journal
Abstract
Description
Metrics
Views
1941
since deposited on 2021-10-17
425
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1941
since deposited on 2021-10-17
425
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations