ESD issues in MEMS: a case study in micromirrors

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Authors
Sangameswaran, Sandeep; De Coster, Jeroen; Linten, Dimitri; Scholz, Mirko; Thijs, Steven; Haspeslagh, Luc; Witvrouw, Ann; Van Hoof, Chris; Groeseneken, Guido; De Wolf, Ingrid
Conference
2nd International ESD Workshop - IEW
Title
ESD issues in MEMS: a case study in micromirrors
Publication type
Oral presentation
Embargo date
9999-12-31
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