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ESD issues in MEMS: a case study in micromirrors

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T10:25:43Z
dc.date.available2021-10-17T10:25:43Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14417
dc.sourceIIOimport
dc.titleESD issues in MEMS: a case study in micromirrors
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference2nd International ESD Workshop - IEW
dc.source.conferencedate12/05/2008
dc.source.conferencelocationPort d'Albret France
imec.availabilityPublished - open access


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