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Fabrication of uniform photonic devices using 193nm optical lithography in silicon-on-insulator
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Fabrication of uniform photonic devices using 193nm optical lithography in silicon-on-insulator
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Selvaraja, Shankar
;
Bogaerts, Wim
;
Van Thourhout, Dries
;
Baets, Roel
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1873
since deposited on 2021-10-17
Acq. date: 2026-07-17
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Views
1873
since deposited on 2021-10-17
Acq. date: 2026-07-17
Citations