Shallow boron implantations in Ge and the role of the pre-amorphization depth

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Authors
Simoen, Eddy; Brouwers, Gijs; Satta, Alessandra; David, M.L.; Pailloux, F.; Parmentier, Brigitte; Clarysse, Trudo; Goossens, Jozefien; Vandervorst, Wilfried; Meuris, Marc
ISSN
1369-8001
Issue
5_6
Journal
Materials Science in Semiconductor Processing
Volume
11
Title
Shallow boron implantations in Ge and the role of the pre-amorphization depth
Publication type
Journal article
Embargo date
9999-12-31
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