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Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium

dc.contributor.authorSimoen, Eddy
dc.contributor.authorBrugere, Antoine
dc.contributor.authorSatta, Alessandra
dc.contributor.authorVan Daele, Benny
dc.contributor.authorBrijs, Bert
dc.contributor.authorRichard, Olivier
dc.contributor.authorGeypen, Jef
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T10:45:29Z
dc.date.available2021-10-17T10:45:29Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14471
dc.sourceIIOimport
dc.titleSolid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1031
dc.source.endpage1038
dc.source.conferenceSiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
dc.source.conferencedate13/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 16, Issue 10


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