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Metal in-diffusion during Fe and Co-germanidation of germanium

dc.contributor.authorSimoen, Eddy
dc.contributor.authorOpsomer, Karl
dc.contributor.authorClaeys, Cor
dc.contributor.authorMaex, Karen
dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R.L.
dc.contributor.authorClauws, P.
dc.date.accessioned2021-10-17T10:47:22Z
dc.date.available2021-10-17T10:47:22Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14476
dc.sourceIIOimport
dc.titleMetal in-diffusion during Fe and Co-germanidation of germanium
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage47
dc.source.endpage52
dc.source.conferenceGettering and Defect Engineering in Semiconductor Technology XII
dc.source.conferencedate14/10/2007
dc.source.conferencelocationErice Italy
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vols. 131-133


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