Show simple item record

Etching Ge, GaAs and InGaAs: A challenge in semiconductor processing

dc.contributor.authorSioncke, Sonja
dc.contributor.authorBrunco, David
dc.contributor.authorMeuris, Marc
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorVrancken, Evi
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-17T10:50:43Z
dc.date.available2021-10-17T10:50:43Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14485
dc.sourceIIOimport
dc.titleEtching Ge, GaAs and InGaAs: A challenge in semiconductor processing
dc.typeMeeting abstract
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2428
dc.source.conference214th ECS Meeting
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA2008-02


Files in this item

Thumbnail
Name:
19157.pdf
Size:
100.1Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record