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Paramagnetic point defects at interfacial layer in biaxial tensile strained (100)Si/SiO2
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Authors
Somers, P.
;
Stesmans, Andre
;
Afanas'ev, V.V.
;
Claeys, Cor
;
Simoen, Eddy
ISSN
0021-8979
Issue
3
Journal
Journal of Applied Physics
Volume
103
Title
Paramagnetic point defects at interfacial layer in biaxial tensile strained (100)Si/SiO2
Publication type
Journal article
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