High hole mobility SGOI substrates obtained by the Ge condensation technique

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Authors
Souriau, Laurent; Nguyen, Tuan; Augendre, Emmanuel; Loo, Roger; Terzieva, Valentina; Caymax, Matty; Cristoloveanu, Sorin; Meuris, Marc; Vandervorst, Wilfried
Conference
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
Title
High hole mobility SGOI substrates obtained by the Ge condensation technique
Publication type
Proceedings paper
Embargo date
9999-12-31
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