A wet etching technique to reveal threading dislocations in thin germanium layers

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Authors
Souriau, Laurent; Terzieva, Valentina; Meuris, Marc; Caymax, Matty
Conference
Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS
Title
A wet etching technique to reveal threading dislocations in thin germanium layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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