Show simple item record

A wet etching technique to reveal threading dislocations in thin germanium layers

dc.contributor.authorSouriau, Laurent
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T10:57:45Z
dc.date.available2021-10-17T10:57:45Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14505
dc.sourceIIOimport
dc.titleA wet etching technique to reveal threading dislocations in thin germanium layers
dc.typeProceedings paper
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage83
dc.source.endpage86
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces VIII - UCPSS
dc.source.conferencedate18/09/2006
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 134


Files in this item

Thumbnail
Name:
15535.pdf
Size:
398.1Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record