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Vapor phase doping: an atomic layer deposition approach to n-type doping in classical chemical vapor deposition epitaxy
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1895 since deposited on 2021-10-17
5last month
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Acq. date: 2026-08-05
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Statistics
Views
1895 since deposited on 2021-10-17
5last month
2last week
Acq. date: 2026-08-05
Citations