dc.contributor.author | Takeuchi, Shotaro | |
dc.contributor.author | Nguyen, Duy | |
dc.contributor.author | Leys, Frederik | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Caymax, Matty | |
dc.date.accessioned | 2021-10-17T11:08:09Z | |
dc.date.available | 2021-10-17T11:08:09Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14534 | |
dc.source | IIOimport | |
dc.title | Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor deposition | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2432 | |
dc.source.conference | 214th ECS Meeting | |
dc.source.conferencedate | 12/10/2008 | |
dc.source.conferencelocation | Honolulu, HI USA | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Meeting Abstracts; vol. MA 2008-02 | |