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Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge Layers on Si substrates
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Authors
Terzieva, Valentina
;
Souriau, Laurent
;
Caymax, Matty
;
Brunco, David
;
Moussa, Alain
;
Van Elshocht, Sven
;
Loo, Roger
;
Clemente, Francesca
;
Satta, Alessandra
;
Meuris, Marc
ISSN
0040-6090
Issue
1
Journal
Thin Solid Films
Volume
517
Title
Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge Layers on Si substrates
Publication type
Journal article
Embargo date
9999-12-31
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