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In situ and real time studies of wet chemical silicon cleaning reactions
Publication:
In situ and real time studies of wet chemical silicon cleaning reactions
Date
1996
Proceedings Paper
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1431.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Teerlinck, Ivo
;
Storm, Wolfgang
;
Bender, Hugo
;
Heyns, Marc
Journal
Abstract
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1908
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Acq. date: 2025-12-09
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Metrics
Views
1908
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-09
Citations