Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)

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Authors

Trojman, Lionel; Pantisano, Luigi; Ferain, Isabelle; Severi, Simone; Maes, Herman; Groeseneken, Guido

ISSN

0018-9383

Issue

12

Journal

IEEE Transactions on Electron Devices

Volume

55

Title

Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)

Publication type

Journal article

Embargo date

9999-12-31

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