Authors

Van Dal, Mark; Vellianitis, Georgios; Duffy, Ray; Doornbos, Gerben; Pawlak, Bartek; Duriez, Blandine; Lai, Li-Shyue; Hikavyy, Andriy; Vandeweyer, Tom; Demand, Marc; Altamirano Sanchez, Efrain; Rooyackers, Rita; Witters, Liesbeth; Collaert, Nadine; Jurczak, Gosia; Kaiser, M.; Weemaes, R. G. R.; Lander, Rob

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS 4: New Materials, Processes, and Equipment

Title

Material aspects and challenges for SOI FinFET integration

Publication type

Proceedings paper

Embargo date

9999-12-31