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Material aspects and challenges for SOI FinFET integration
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Authors
Van Dal, Mark
;
Vellianitis, Georgios
;
Duffy, Ray
;
Pawlak, Bartek
;
Lai, Li-Shyue
;
Hikavyy, Andriy
;
Collaert, Nadine
;
Jurczak, Gosia
;
Lander, Rob
Conference
213th ECS Meeting
Title
Material aspects and challenges for SOI FinFET integration
Publication type
Meeting abstract
Embargo date
9999-12-31
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